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AsH3
TRACE AsH3 ANALYSIS
• Instrument: Micro GCMultiDetek series
• Detector: PlasmaDetek series (PED)
• Carrier Gas: Helium (Argon can be used as well)
• Columns type: 30 meter 0.53mm1D Plot Alumina BOND/Na2S04
• Carrier flow rate: 4sccm
• Sampling loop volume: 60uL
• Column temperature: 40 Celcius isothermal
• Impurities concentration:
AsH3: 6.2 ppm
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TRACE PH3 ANALYSIS
• Instrument: Micro GC MultiDetek series
• Detector: PlasmaDetek series (PED)
• Carrier Gas: Helium (Argoncan be used as well)
• Columns type: 30 meter 0.53mm1D Plot Alumina BOND/Na2S04
• Carrier flow rate: 4sccm
• Sampling loop volume: 60uL
• Column temperature: 40 Celcius isothermal
• Impurities concentration:
PH3: 7.5 ppm
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