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AsH3
ater
TRACE ARSINE ANALYSIS
• Instrument: Micro GCMultiDetek series
• Detector: PlasmaDetek series (PED)
• Carrier Gas: Helium (Argon can be used as well)
• Columns type: 10 meters Plot
Q
-Bond 0.32mm1D
• Carrier flow rate: 3sccm
• Sampling loop volume: 60uL
• Column temperature: 50 Celcius isothermal
• Impurities concentration: AsH3: 6.2 ppm
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TRACE PHOSPHINE ANALYSIS
• Instrument: Micro GCMultiDetek series
• Detector: PlasmaDetek series (PED)
• Carrier Gas: Helium (Argon can be used as well)
• Columns type: 10 meters Plot
Q-
Bond 0.32mm1D
• Carrier flow rate: 3sccm
• Sampling loop volume: 60uL
• Column temperature: 50 Celcius isothermal
• Impurities concentration: PH3: 7.5 ppm
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www.ldetek.com• Wher
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ROIIII
~1J'1tIC:
+61(0)3 97622034
Australian Distributors
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Importers
&
Manufacurers
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ECHI7~'~g'yPtyLtd
www.chrDmtech.net.BUWebsite NEW:
www.chromalytic.com.auE-mail:
Info@Chromtech.net.auTel: 03 9762 2034 ..• in AUSTRALIA