®
1FOO5FDI%S
|
#FMMFGPOUF 1"
|
'BY
XXX4JMDP5FLDPN
The slowoutgassingof water vapor andother contami-
nants inprocess vacuum chambers cangreatly hinder
evacuation rates, process throughput, and ultimatebase
pressures. The applicationof SilcoGuard1000 throughout
exposed surfaces of vacuum systems candramatically
reduce outgassing rates andprovide aproductivity ad-
vantage toprocess chambers that requiremore rapid and
ef$cient evacuations.
Conclusion
SilcoTek can help semiconductormanufacturersmeet cost
andproductivity challenges by improving the surface
performance of stainless steel:
t4JMDPMMPZ
®
JNQSPWFT DPSSPTJPO SFTJTUBODFCZ Y PSNPSF
t4JMDP/FSU
®
FMJNJOBUFTNPJTUVSF DPOUBNJOBUJPOCZ PSNPSF
t4JMDP(VBSE
®
JNQSPWFT DIBNCFS QSPEVDUJWJUZ CZ Y PSNPSF
SilcoTek treatments canbe applied to existingprocess
components. Custom treatment is available for process-
speci$c components and applications. To learnmore
about howSilcoTek can improve theperformance of your
system, go towww.SilcoTek.comor call us! 814-353-1778
Acceleratemoisturedry-downwith
SilcoNert
®
2000 treatment
Gas transfer systems serving the semiconductor industry
require lowmoisture content. Data for wet-up anddry-
down experiments,measuring the relative response time
formoisture content change in treated electropolished
stainless steel tubing and standard 316L stainless steel
tubing, demonstrate a signi$cant advantage in using
SilcoNert
®
2000 treated versus untreated tubing.
Wet-up curves for SilcoNert2000 treated electropolished,
untreated electropolished, and standard tubing are com-
pared inFigure 3. Treated electropolished tubing reached
the 98% saturation limit in 30minutes, compared to 60
minutes for electropolished tubing. Standard tubing could
only achieve a 96% uptake, after 180minutes.
2
Moisture
dry-down curves showSilcoNert2000 treated electropol-
ished tubing achieveddry-down in 35minutes, electropo-
lished tubing required 65minutes, and standard tubing
required 175minutes. Figure 4 compares thedry-down
performance for tubing saturatedwith 10ppmofmoisture.
SilcoGuard
®
1000 treatment cutspump-down time
Semiconductor processes requiring frequent pump-downs
can realizedramaticproductivity improvements by treating
vacuum chamberswithSilcoGuard
®
1000.
Commercial 316LStainlessSteel
1.0
0.9
0.8
0.7
0.6
0.5
0.4
0.3
0.2
20
0
40
60
80
100
120
140
160
180
0.1
Electropolished316LStainlessSteel
SilcoNert 2000-TreatedElectropolished 316LStainlessSteel
Time (minutes)
Cout/Cin
®
Commercial 316LStainlessSteel
1.0
0.9
0.8
0.7
0.6
0.5
0.4
0.3
0.2
20
0
40
60
80
100
120
140
160
180
0.1
0.0
Electropolished 316LStainlessSteel
SilcoNert 2000-TreatedElectropolished 316LStainlessSteel
Time (minutes)
Cout/Cin
®
Figure 3
SilcoTek treated electropolished tubing stabilizes at 1ppm
moisturemuch faster than conventional surfaces.
3
Figure 5
compares pump-down rates for aSilcoGuard1000 treated vs. an
untreated chamber. SilcoGuard1000will reducepumpdown times
by 2.5x ormore, compared tountreated chambers.
4
Figure 4
SilcoTek treated electropolished tubingdriesmuch faster than
conventional surfaces.
3
®
References
1.M. Zamanzadeh; G. Bayer; G. Rhodes; D. Smith;M. Higgins; LaboratoryCorrosionTestingof
aChemical Vapor DepositedAmorphousSiliconCoating; MatcoAssociates, Inc. Pittsburgh, PA;
RestekCorporation, Bellefonte, PA. 2005
2. Vininski, Joseph; Lawrence, David; Torres, Robert; Diede, Ehrich; Daniels,Mia; “Corrosion
Resistance of Cost EffectiveAlternativeMaterials for Semiconductor GasDistributionSystems”;
MathesonTri-Gas, Longmont, CO; DiedePrecisionWelding, Longmont, CO; Sherwood, Harsco
Corporation,Washington, PA. 2002
3. RelativeResponse Time of True Tube™whenMeasuringMoistureContent in aSampleStream
Test Report, HaritecScienti$c&EngineeringSupport, Calgary, Alberta, Canada,May 2004. Cour-
tesy of O’BrienCorporation, available on request fromRestek.
4. D. Smith;M. Higgins; B. Kendall; LowOutgassingof Silicon-BasedCoatings onStainlessSteel
Surfaces for VacuumApplications; Presented at annual SVCmeeting, RestekCorporation/Elvac
Laboratories (2005).
©Copyright 2013SilcoTek
SilcoTekoffers treatmentsonacustombasisdirect fromour facility. Just follow 2easy steps tomaximize theperformanceof your product!
SilcoTek treatmentsareavailableworldwide through representatives inanalytical instrumentation, tubingspecialists, fittingmanufacturers, and
other technology industries. For acomplete listingofwhereyoucanpurchaseSilcoTek treatedproducts, go toourwebsitewww.SilcoTek.com
Step 1
-
Get aquote!
Wemake it easywith quote options to fit your
needs visit our website at
and
complete our on-line quote request form or fax
your quote request toQuotes at 814.353.1697
or e-mail it toSilcod@SilcoTek.com.We’ll get a
quote out to youwithin 24 hours!
Step 2
- Send in your parts!
Mailing instructions, shipping labels and service
number will be forwarded to you alongwith your
quotation. Box up your parts and send them to
us. Your order will be processed in 10working
days or less.
Our 2 touch systemmeans
zerodisappointments.
We’ll notify youwhenwe
receive your parts andwhen
your order is ready to ship.
SilcoTek treatments areavailableworldwide!
Lit Cat #ST007
SilcoNert, Silcolloy, SilcoGuard, Silcosteel, Siltekand
SilcoTekare registered trademarksof SilcoTek
®
Corporation.
Other trademarks: TrueTube (O’BrienCorp.)
2/28
38
