TheSilcoGuard1000 layer is rugged anddurable enough
to stand up to the sealing requirements needed to attain a
UHV environment. Figure 4 shows the knife-edge of a
SilcoGuard 1000-treatedConflat
®
sealing surface. The knife-
edge penetrates and seals in the copper O-ring seatedwithin
theConflat
®
surface. Even aftermultiple cycles of this sealing
process, theSilcoGuard1000 layer remains intact.
InSummary
SilcoGuard1000 is a high purity silicon chemical vapor
deposition (CVD) surface treatment that can be applied to
existingUHV systems. SilcoGuard1000 significantly reduces
outgassing in stainless steel UHV systems. The hydrophobic
nature of SilcoGuard 1000 allows for fast, efficient pumping
of moisture and other common surface contaminants from
UHV systems. Less contamination results in improvedprocess
yields, improvedprocess efficiency and improvedprocess
equipment productivity. Formore information on howSilcoTek
can improve the performance, productivity, andprofit of your
process; go to our web site,
or call us at
814-353-1778.
References
1. D. Smith;M. Higgins; B. Kendall; LowOutgassingof Silicon-BasedCoatings on
StainlessSteel Surfaces for VacuumApplications; Presented at annual SVCmeeting,
RestekCorporation/Elvac Laboratories (2005).
2. RelativeResponse Time of True TubewhenMeasuringMoistureContent in a
SampleStreamTest Report, HaritecScienti"c&EngineeringSupport, Calgary,
Alberta, Canada,May 2004. Courtesy of O’BrienCorporation, available on request
fromSilcoTek.
®
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|
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|
'BY
Wet-up curves for SilcoGuard1000 treated electropolished,
untreated electropolished, and standard tubing are compared
in Figure 2. Treated electropolished tubing reached the 98%
saturation limit in 30minutes, compared to 60minutes for
electropolished tubing. Standard tubing couldonly achieve a
96% uptake, after 180minutes.
Moisture dry-down curves showSilcoGuard 1000 treated
electropolished tubing achieveddry-down in 35minutes,
electropolished tubing required 65minutes, and standard
tubing required 175minutes. Figure 3 compares the dry-down
performance for tubing saturatedwith 10ppm of moisture.
Figure 4
ThedurableSilcoGuard1000 layer will withstand the sealing
requirements of UHV,maintaining knife-edge integrity.
SilcoTekoffers treatmentsonacustombasisdirect fromour facility. Just follow2easy steps tomaximize theperformanceof your product!
SilcoTek treatmentsareavailableworldwide through representatives inanalytical instrumentation, tubingspecialists, fittingmanufacturers, and
other technology industries. For acomplete listingofwhereyoucanpurchaseSilcoTek treatedproducts, go toourwebsitewww.SilcoTek.com
Step1
-
Get aquote!
Wemake it easywith quote options to fit your
needs visit our website at
and
complete our on-line quote request form or fax
your quote request to Quotes at
.
.
or e-mail it to
. We’ll get
a quote out to youwithin 24 hours!
Step2
- Send in your parts!
Mailing instructions, shipping labels and a service
number will be forwarded to you alongwith your
quotation. Box up your parts and send them to
us. Your order will be processed in 10working
days or less.
Our 2 touch systemmeans
zerodisappoinents.
We’ll notify youwhenwe
receive your parts andwhen
your order is ready to ship.
SilcoTek treatments areavailableworldwide!
Figure2
SilcoGuard1000 treated electropolished tubing stabilizes at 1ppm
moisturemuch faster than conventional surfaces.
2
Data courtesy of O’BrienCorporation.
2
®
Acceleratemoisturedry-downwithSilcoGuard 1000
Gas transfer systems serving the semiconductor industry require
lowmoisturecontent. Data forwet-upanddry-downexperiments,
measuring the relative response time formoisturecontent change
in treatedelectropolished stainless steel tubingand standard316L
stainless steel tubingdemonstrates agreat advantage inusing
SilcoGuard1000 treated versus untreated tubing.
Figure 3
SilcoTek treated electropolished tubingdriesmuch faster than
conventional surfaces.
2
®
Lit Cat#SG-001
SilcoGuard
®
,
SilcoSteel
®
,
andSilcoTek
®
are registered trademarksof SilcoTek
®
Corporation.
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