Chromtech SuppierOperatingManuals - page 14

set as2.2E2=220mtorr, the lower default value is set as
2.0E2=200mtorr
)。
After setting all the values, then press “Function” to
enter working status. During the operation above, if “Reset” is pressed,
then measuring status is entered.
3
Setting and modification of PLC parameters
As human-friendly monitoring screen TP170 is adopted
it is very easy to
modify PLC parameters
this can be done by selecting “Set” button and
opening Parameter Set. Screen of Menu 4 It contains all the parameters
available
if a parameter is to be changed, just press the corresponding
display box and a keyboard screen will be displayed, select the number
key in the keyboard and press enter to modify the parameter.
6. Maintenance and common debugs.
1. Make sure the power supplier’s voltage is match the instrument.
A
B
C
D
1
2
3
ESC
4
7
E
5
8
F
6
9
O
DEL
+/-
14
1...,4,5,6,7,8,9,10,11,12,13 15,16-17,18-19,20-21,22-23,24-25,26-27,28-29,30-31,32-33,...269
Powered by FlippingBook