2
）
Press
“
Run-M
”
and enter manual operation status.
3
）
Press
“
Pump
”
button and start pumping vacuum. Make sure canister
valve is opened.
4
）
Press
“
Fill wet gas
”
or “Fill dry gas ” button and start filling wet or dry
zero air
，
when filling pressure P1
≥
30Psi
，
the system will automatically
shut down air valve.
5
）
Repeat step 3 and 4 until cleaning process is completed. Press
“Reset” to return to default status and exit the operation.
D. Instructions for automatic operation
1
）
Open main menu, select Auto button and open the “Auto Operation
Menu”.
2
）
Press
“
Run-A
”
and enter automatic operation status
，
press
“
Start
”
to start auto operation process. The system first enters wet zero air
filling process. canisters is filled with wet zero air
，
The vent valve
has been open when air filling pressure reaches P1 ( P1=30Psi)
，
then the vacuum pump valve open. The system enters wet gas clean
cycle.
3
）
When the system reaches set vacuum pressure value
，
that is P2
≤
set value
（
P2
default value is 500mtorr
，
it is changeable when
needed
），
the process is shifted to wet zero air filling process.
4
）
When the system enters wet gas filling process
，
canister is filled with
wet zero air(dry zero air pass through Humidifier get humidity)
，
air
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