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ANALYSIS OF PERMANENT GASES
IN DIFFERENT MATRIX USING
PLASMADETEK
This analyzer has been configured with two independent
channels, each one dedicated to one matrix. The system is based
on a GC Clarus 580 from Perkin Elmer equipped with electronic
pressure regulators. Two high quality 10 ports diaphragm valves
with internal purge ensure sample injection directly on-column
and matrix backflush.The precolumn is a semi-capillary Plot
Q 30m x 530um column. The analytical column is a Molsieve
5A 30m x 530um column with a by-pass flow to elute CO
2
. Two
detectors Plasmadetek with two internal detectors each are used
to quantify the components. The signal coming from each PED is
sent to the acquisition software Totalchrom.
Figure 1
Figure 2
Figure 3
Figure 4
Figure 5
A 5 ppm standard of each permanent gas has been used to
calibrate the system and determine LOQ for each component.
The chromatograms shown below illustrate the results we
can obtain from this configuration. The chromatogram in
figure 2 is obtained with the detector optimized for H
2
and CH
4
.
The chromatogram in figure 3 is obtained with the detector
optimized for N
2
, CO and CO
2
.
The use of Plasmadetek in this system provides excellent results
regarding sensibility and selectivity. The Plasmadetek is ideal
for this kind of analyses because it can support high volume of
sample injection and we can adjust Make Up gas flow to obtain
a suitable chromatogram. The installation of Plasmadetek on a
Clarus GC is easy and don’t need physical modification of the
GC. Its design is in full harmony with the GC whose all parts are
accessible for an easy modification (figure 5).
One of the main advantages of Plasmadetek is that it is
maintenance free, so that gives a robust system for long
analyses sequences in the laboratory or for on-line measuring
analyzers. The large range of concentrations (from ppb to %) and
the available selectivity of Plasmadetek make this detector ideal
to work in a lot of domains where GC is necessary.
Component Conc.
(ppm)
Peak
Height
Noise S/N LOD
(ppb)
S/N=3
LOQ
(ppb)
S/N=5
H
2
5
296 0.02 14800 1.0 1.7
CH
4
5
808 0.02 40400 0.4 0.6
CO
2
5
223 0.02 11150 1.3 2.2
N
2
5
793 0.02 39650 0.4 0.6
CO
5
110 0.02 5500 2.7 4.5
The goal of this application is to analyze permanent gases in different matrix used for electronic
industry. The investigation of these impurities is important for gas providers to ensure the high purity
of their products to their customers.
ANTELIA:
9 Chemin de la Brocardière, 69570 DARDILLY •
contact@antelia.fr• Port +33 6 77 01 51 25 • Tel +33 4 72 17 82 10 • Fax +33 4 78 66 07 03
Where
innovation
leads to
success
www.
ldetek
.com
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