RtxPresentations07 - page 1938-1939

Figure2
Pressure increasewithheat
0
5
10
15
20
25
Min. (Temp ºC)
0.5 (112)
1 (145)
1.5 (167)
2 (186)
2.5 (195)
3 (201)
unitsof 10
-7
Torr
N1 - Silcosteel
®
UHV
N2 - Heat cleaned
N3 - As rec'd
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