Theoretical Basis
• Outgassing rate (F) inmonolayers per sec:
F= [exp (-E/RT)]/t’
t’ = period of oscillation of moleculeperp. To surface, ca. 10
-13
sec
E= energy of desorption (Kcal/gmol)
R= gas constant
source: Roth, A. VacuumTechnology, Elsevier SciencePublishers,
Amsterdam 2
nd
ed., p. 177.
• Experimental designallows us to isolateanddirectly compare
outgassing rateswith increasing temperature. By applyingheat, the
outgassing rates areexponentially increased for thepurposeof
timely data collection. These comparisonswithexperimental
controls directly illustrate thedifference incurredby theapplied
coatings
