System
• Cleaningof all components as follows:
– Ultrasonic cleaningof all components inaqueous caustic
surfactant.
– Heat to400ºC in inert atmosphere
– Vacuumat 400ºC
• Silcosteel
®
coatings (amorphous silicon) applied to components,
after previous cleaningprocess, to reduceoutgassing. Coating
process:
– CVDprocess
– Entire surface coverage
– Manipulationof coatingprocess parameters reduceoutgassing
• Figure1 is aphotographof anon-coatedand coated component
used inoneof the studies.
