RtxPresentations07 - page 2762-2763

ExampleApplications
ƒ
Coatingof accelerator chambers to create
higher vacuumenvironment
ƒ
Use in coatingof semi-conductor
manufacturingequipment todecrease
defect rate
ƒ
Reducing timeneeded toachievehigh
vacuumenvironments inanalytical
equipment (SEM, XPS, etc.,.)
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