RtxPresentations07 - page 2760-2761

Ultra-HighVacuumData (cont.)
ƒ Turbopump Turbopump , 7.5 x 10 , 7.5 x 10-8 Torr base pressure
ƒ 10hr under vacuum (∆P2)
ƒ 14x improvement at 61ºC
Pressure increasewithheat
0
0.5
1
1.5
2
2.5
3
3.5
4
4.5
5
Seconds
(Temp ºC)
15 (61) 30 (105) 45 (137) 60 (161)
∆Punitsof 10
-7
Torr
Silcosteel®-UHV
Heat cleaned