Ultra-HighVacuumData
BruceKendall: Elvac Labs, PSUPhysics prof. (ret.)
Turbopump
opum
, 4.6 x 10
-
-
7
7
Torr basepressure
1hr under vacuum (
∆
P1)
27x improvement at 61ºC
Pressure increasewithheat
0
5
10
15
20
25
Seconds
(Temp ºC)
15 (61)
30 (105)
45 (137)
60 (161)
∆
Punitsof 10
-7
Torr
Silcosteel
®
-UHV
Heat cleaned
