Ultra-HighVacuumapplications
a-silicon layer releasesmoisture from surface
more readily in vacuum
Layer acts as a boundry to reduce outgassing of
hydrocarbons andmoisture from coated
components used in vacuum systems
Reduced outgassing rate by 14x@10 hrs of
pumping
Consistently outperforms cleaned parts
Eliminates bakeout
Faster pump down
Lower base pressurewith smaller pumps
